Method of manufacture of a thermally actuated ink jet including a tapered heater element

ABSTRACT

A method of manufacture of an ink jet printing nozzle arrangement on a wafer is disclosed, the arrangement including: an ink chamber having an ink ejection nozzle in one wall thereof for the ejection of ink from the ink chamber; a moveable paddle vane located within the ink chamber, the paddle vane including a concave surface in the area adjacent the ink ejection nozzle; and an actuator means adapted to move the paddle vane so as to cause ink within the ink chamber to be ejected from the ink ejection nozzle; the method comprising the steps of; 
     (a) starting with a silicon wafer layer having requisite circuitry deposited thereon; 
     (b) depositing and etching a first sacrificial layer to form a cavity for the paddle vane and a portion of the nozzle chamber; 
     (c) depositing and etching a series of layers simultaneously forming the operational portions of the actuator means and the paddle vane; 
     (d) depositing a second sacrificial layer forming a cavity for the ink chamber walls and remaining portions (if any) of the actuator; 
     (e) depositing the chamber walls and remaining portions of the actuator; 
     (f) forming a nozzle chamber roof including an ink ejection nozzle; 
     (g) etching the sacrificial layers away. 
     Preferably, the step (c) includes utilizing a single mask to etch the layers and step (c) further includes depositing two layers of substantially the same thermal properties, one of the layers including an operational portion of the actuator, such that, upon cooling of the layers, the two layers are in a state of thermal tension between one other.

CROSS REFERENCES TO RELATED APPLICATIONS

The following co-pending U.S. patent applications, identified by their U.S. patent application serial numbers (USSN), were filed simultaneously to the present application on Jul. 10, 1998, and are hereby incorporated by cross-reference.

USSN DOCKET TITLE 09/113,060 ART01 Digital Instant Print Camera with Image Processing Capability 09/113,070 ART02 Image Transformation Means including User Interface 09/113,073 ART03 Digital Camera System with Integral Print Roll 09/112,748 ART04 Camera System Including Digital Audio Message Recording on Photographs 09/112,747 ART06 Orientation Detection for Digital Cameras 09/112,776 ART07 Print Roll Having an Ink Return Tray 09/112,750 ART08 Utilising Autofocus Information for Image Processing in a Digital Camera 09/112,746 ART09 Utilising Eye Detection Methods for Image Processing in a Digital Image Camera 09/112,743 ART10 Utilising Exposure Information for Image Processing in a Digital Camera 09/112,742 ART11 Utilising Flash Information for Image Processing in a Digital Camera 09/112,741 ART12 Method of Printing on the Back of Output Photo Image in a Digital Instant Camera 09/112,740 ART13 De-curling Print Media in a Digital Instant Printing Camera 09/112,739 ART15 Psuedo-3D Stereoscopic Images & Output Device 09/113,053 ART16 Print Media Roll and Ink Replaceable Cartridge 09/112,738 ART17 Psuedo-3D Stereoscopic Print Medium 09/113,067 ART18 Preprinted Print Rolls for use in an Image Processing Device 09/113,063 ART19 Method and Apparatus for Information Storage in a Portable Print Roll 09/113,069 ART20 Authentication System for Camera Print Rolls 09/112,744 ART21 Anisotropic Rigidity to Reduce Curl in Rolled Media 09/113,058 ART22 Prints Remaining Indicator for Camera with Variable Length Print Capability 09/112,777 ART24 Producing Automatic “Painting” Effects in Images 09/113,224 ART25 Digital Image Warping System 09/112,804 ART26 Digital Image Region Detection Method and Apparatus 09/112,805 ART27 Brush Stroke Palette Feedback Method for Automatic Digital “Painting” Effects 09/113,072 ART28 Data Distribution Method and Apparatus 09/112,785 ART29 Dot Center Tracking in Optical Storage Systems using Ink Dots 09/112,797 ART30 Utilising of Brush Stroking Techniques in the Generation of Computer Images 09/112,796 ART31 Image Production Utilizing Text Editing Including Complex Character Sets 09/113,071 ART32 Camera System with computer Language Interpreter 09/112,824 ART33 High Quality Image Copier with Exact Reproduction of Digitally Halftoned Images 09/113,090 ART34 A Digital Camera System having Motion Deblurring Means 09/112,823 ART38 Miniature Color Printer using Ink and Paper Cartridges 09/113,222 ART39 Digital Information Distribution by Means of Printed Cards 09/112,786 ART42 Digital Camera System Containing a VLIW Vector Processor 09/113,051 ART43 Target Detection for Dot Region Alignment in Optical Storage Systems using Ink Dots 09/112,782 ART44 Fault Tolerant Dot Detection in Optical Storage Systems using Ink Dots 09/113,056 ART45 Dot Adjacency Compensation in Optical Storage Systems using Ink Dots 09/113,059 ART46 Adaptive Tracking of Dots in Optical Storage Systems using Ink Dots 09/113,091 ART47 Bump Map Compositing for Simulated Digital Painting Effects 09/112,753 ART48 Production of Artistic Effects in Images Utilising Restricted Gamut Spaces 09/113,055 ART50 Utilisation of Image Tiling Effects in Photographs 09/113,057 ART51 Utilisation of Image Texture Mapping in Photographs 09/113,054 ART52 Utilisation of Image Illumination Effects in Photographs 09/112,752 ART53 Garment Design and Fabric Printing System Utilizing Digitally Encoded Design Cards 09/112,759 ART54 Custom Garment Design and Fabric Printing System 09/112,757 ART56 Cascading Image Modification using Multiple Digital Cameras Incorporating Image Processing 09/112,758 ART57 Binocular Glasses with an Integral Printer Device 09/113,107 ART58 Reader to Decode Sound and Play Sound Encoded on Photographs 09/112,829 ART59 Data Addition to Optical Storage Cards using Ink Dots 09/112,792 ART60 Vending Machine for the Production of Customised Photos and Artcards 09/112,791 ART61 A Re-Writeable Optical Card Reader/Writer Unit using Ink Dots for Data Storage 09/112,790 ART62 Artcard for the Control of the Operation of a Camera Device 09/112,789 ART63 Artcard for the Administration of the Operation of a Camera Device 09/112,788 ART64 Magnetic Recordable Media for Photographic Prints 09/112,795 ART65 Digital Photograph Storage using Ink Jet Printing 09/112,749 ART66 System for High Volume Printing of Optical Storage Cards Using Ink Dots 09/112,784 ART68 Encoded Data Card Reading System 09/112,783 ART69 Ink and Media Cartridge with Axial Ink Chambers 09/112,763 Auth02 Circuit for Protecting Chips Against IDD Fluctuation Attacks 09/112,762 Auth03 Method for Implementing Non-Flashing CMOS 09/112,737 Auth04 Method for Protecting On-Chip Memory (flash and RAM) 09/112,761 Auth05 Method for Making a Chip Tamper-Resistant 09/113,223 Auth06 A system for authenticating physical objects 09/112,781 DOT01 Data Distribution Mechanism in the form of Ink Dots on Cards 09/113,052 DOT02 Business Card Incorporating Optical Data Storage as Ink Dots 09/112,834 Fluid01 Fluid Supply Mechanism 09/113,103 Fluid02 Fluid Supply Mechanism 09/113,101 Fluid03 Replaceable Pagewidth Ink jet Print Head 09/112,751 IJ01 Radiant Plunger Electromagnetic Ink Jet Printing Mechanism 09/112,787 IJ02 Electrostatic Ink Jet Printing Mechanism 09/112,802 IJ03 Planar Thermoelastic Bend Actuator Ink Jet Printing Mechanism 09/112,803 IJ04 Stacked Electrostatic Ink Jet Printing Mechanism 09/113,097 IJ05 Reverse Spring Lever Ink Jet Printing Mechanism 09/113,099 IJ06 Paddle Type Ink Jet Printing Mechanism 09/113,084 IJ07 Permanent Magnet Electromagnetic Ink Jet Printing Mechanism 09/113,066 IJ08 Planar Swing Grill Electromagnetic Ink Jet Printing Mechanism 09/112,778 IJ09 Pump Action Refill Ink Jet Printing Mechanism 09/112,779 IJ10 Pulsed Magnetic Field Ink Jet Printing Mechanism 09/113,077 IJ11 Two Plate Reverse Firing Electromagnetic Ink Jet Printing Mechanism 09/113,061 IJ12 Linear Stepper Actuator Ink Jet Printing Mechanism 09/112,818 IJ13 Gear Driven Shutter Ink Jet Printing Mechanism 09/112,816 IJ14 Tapered Magnetic Pole Electromagnetic Ink Jet Printing Mechanism 09/112,772 IJ15 Linear Spring Electromagnetic Grill Ink Jet Printing Mechanism 09/112,819 IJ16 Lorenz Diaphragm Electromagnetic Ink Jet Printing Mechanism 09/112,815 IJ17 PTFE Surface Shooting Shuttered Oscillating Pressure Ink Jet Printing Mechanism 09/113,096 IJ18 Buckle Grill Oscillating Pressure Ink Jet Printing Mechanism 09/113,068 IJ19 Shutter Based Ink Jet Printing Mechanism 09/113,095 IJ20 Curling Calyx Thermoelastic Ink Jet Printing Mechanism 09/112,808 IJ21 Thermal Actuated Ink Jet Printing Mechanism 09/112,809 IJ22 Iris Motion Ink Jet Printing Mechanism 09/112,780 IJ23 Direct Firing Thermal Bend Actuator Ink Jet Printing Mechanism 09/113,083 IJ24 Conductive PTFE Bend Actuator Vented Ink Jet Printing Mechanism 09/113,121 IJ25 Magnetostrictive Ink Jet Printing Mechanism 09/113,122 IJ26 Shape Memory Alloy Ink Jet Printing Mechanism 09/112,793 IJ27 Buckle Plate Ink Jet Printing Mechanism 09/112,794 IJ28 Thermal Elastic Rotary Impeller Ink Jet Printing Mechanism 09/113,128 IJ29 Thermoelastic Bend Actuator Ink Jet Printing Mechanism 09/113,127 IJ30 Thermoelastic Bend Actuator Using PTFE Corrugated Heater Ink Jet Printing Mechanism 09/112,756 IJ31 Bend Actuator Direct Ink Supply Ink Jet Printing Mechanism 09/112,755 IJ32 High Young's Modulus Thermoelastic Ink Jet Printing Mechanism 09/112,754 IJ33 Thermally Actuated Slotted Chamber Wall Ink Jet Printing Mechanism 09/112,811 IJ34 Ink Jet Printer having a Thermal Actuator Comprising an External Coil Spring 09/112,812 IJ35 Trough Container Ink Jet Printing Mechanism with Paddle 09/112,813 IJ36 Dual Chamber Single Actuator Ink Jet Printing Mechanism 09/112,814 IJ37 Dual Nozzle Single Horizontal Fulcrum Actuator Ink Jet Printing Mechanism 09/112,764 IJ38 Dual Nozzle Single Horizontal Actuator Ink Jet Printing Mechanism 09/112,765 IJ39 Single Bend Actuator Cupped Paddle Ink Jet Printing Mechanism 09/112,767 IJ40 Thermally Actuated Ink Jet Printing Mechanism having a Series of Thermal Actuator Units 09/112,768 IJ41 Thermally Actuated Ink Jet Printing Mechanism including a Tapered Heater Element 09/112,807 IJ42 Radial Back-Curling Thermoelastic Ink Jet Printing Mechanism 09/112,806 IJ43 Inverted Radial Back-Curling Thermoelastic Ink Jet Printing Mechanism 09/112,820 IJ44 Surface Bend Actuator Vented Ink Supply Ink Jet Printing Mechanism 09/112,821 IJ45 A Solenoid Actuated Magnetic Plate Ink Jet Printing Mechanism 09/112,822 IJM01 Method of Manufacture of a Radiant Plunger Electromagnetic Ink Jet Printer 09/112,825 IJM02 Method of Manufacture of an Electrostatic Ink Jet Printer 09/112,826 IJM03 Method of Manufacture of a Planar Thermoelastic Bend Actuator Ink Jet Printer 09/112,827 IJM04 Method of Manufacture of a Stacked Electrostatic Ink Jet Printer 09/112,828 IJM05 A Method of Manufacture of a Reverse Spring Lever Ink Jet Printer 09/113,111 IJM06 A Method of Manufacture of a Paddle Type Ink Jet Printer 09/113,108 IJM07 Method of Manufacture of a Permanent Magnet Electromagnetic Ink Jet Printer 09/113,109 IJM08 Method of Manufacture of a Planar Swing Grill Electromagnetic Ink Jet Printer 09/113,123 IJM09 A Method of Manufacture of a Pump Action Refill Ink Jet Printer 09/113,114 IJM10 Method of Manufacture of a Pulsed Magnetic Field Ink Jet Printer 09/113,115 IJM11 Method of Manufacture of a Two Plate Reverse Firing Electromagnetic Ink Jet Printer 09/113,129 IJM12 Method of Manufacture of a Linear Stepper Actuator Ink Jet Printer 09/113,124 IJM13 Method of Manufacture of a Gear Driven Shutter Ink Jet Printer 09/113,125 IJM14 A Method of Manufacture of a Tapered Magnetic Pole Electromagnetic Ink Jet Printer 09/113,126 IJM15 A Method of Manufacture of a Linear Spring Electromagnetic Grill Ink Jet Printer 09/113,119 IJM16 Method of Manufacture of a Lorenz Diaphragm Electromagnetic Ink Jet Printer 09/113,120 IJM17 A Method of Manufacture of a PTFE Surface Shooting Shuttered Oscillating Pressure Ink Jet Printer 09/113,221 IJM18 Method of Manufacture of a Buckle Strip Grill Oscillating Pressure Ink Jet Printer 09/113,116 IJM19 Method of Manufacture of a Shutter Based Ink Jet Printer 09/113,118 IJM20 Method of Manufacture of a Curling Calyx Thermoelastic Ink Jet Printer 09/113,117 IJM21 A Method of Manufacture of a Thermal Actuated Ink Jet Printer 09/113,113 IJM22 Method of Manufacture of an Iris Motion Ink Jet Printer 09/113,130 IJM23 A Method of Manufacturing of a Direct Firing Thermal Bend Actuator Ink Jet Printer 09/113,110 IJM24 Method of Manufacture of a Conductive PTFE Bend Actuator Vented Ink Jet Printer 09/113,112 IJM25 A Method of Manufacture of a Magneto- strictive Ink Jet Printer 09/113,087 IJM26 Method of Manufacture of a Shape Memory Alloy Ink Jet Printer 09/113,074 IJM27 Method of Manufacture of Buckle Plate Ink Jet Printer 09/113,089 IJM28 Method of Manufacture of a Thermal Elastic Rotary Impeller Ink Jet Printer 09/113,088 IJM29 Method of Manufacture of a Thermoelastic Bend Actuator Ink Jet Printer 09/112,771 IJM30 Method of Manufacture of a Thermoelastic Bend Actuator Using PTFE and Corrugated Copper Ink Jet Printer 09/112,769 IJM31 Method of Manufacture of a Bend Actuator Direct Ink Supply Ink Jet Printer 09/112,770 IJM32 Method of Manufacture of a High Young's Modulus Thermoelastic Ink Jet Printer 09/112,817 IJM33 Method of Manufacture of a Thermally Actuated Slotted Chamber Wall Ink Jet Printer 09/113,076 IJM34 Method of Manufacture of an Ink Jet Printer Having a Thermal Actuator Comprising an External Coil Spring 09/112,798 IJM35 Method of Manufacture of an Image Creation Apparatus 09/112,801 IJM36 A Method of Manufacture of a Dual Chamber Single Vertical Actuator Ink Jet Printer 09/112,800 IJM37 Dual Nozzle Single Horizontal Fulcrum Actuator Ink Jet 09/112,799 IJM38 Method of Manufacture of a Dual Nozzle Single Horizontal Actuator Ink Jet Printer 09/113,098 IJM39 Single Bend Actuator Cupped Paddle Ink Jet Printing Device 09/112,833 IJM40 Method of Manufacture of a Thermally Actuated Ink Jet Printer having a Series of Thermal Actuator Units 09/112,832 IJM41 A Method of Manufacture of a Thermally Actuated Ink Jet including a Tapered Heater Element 09/112,831 IJM42 Method of Manufacture of a Radial Back- Curling Thermoelastic Ink Jet Printer 09/112,830 IJM43 Method of Manufacture of an Inverted Radial Back-Curling Thermoelastic Ink Jet 09/112,836 IJM44 Method of Manufacture of a Surface Bend Actuator Vented Ink Supply Ink Jet Printer 09/112,835 IJM45 Method of Manufacture of a Solenoid Actuated Magnetic Plate Ink Jet Printer 09/113,102 IR01 A Low Cost Disposable Digital Instant Printing Camera System 09/113,106 IR02 A Compact Form Storage of Replenishable Portions of a Print On Demand Camera System 09/113,105 IR04 Print Head Ink Supply System 09/113,104 IR05 Integrated Camera Circuit including Image Sensor, Image Processing, and Printer Drive Circuits 09/112,810 IR06 Reusable Camera System which Authenticates a Refill Station 09/112,766 IR10 Recycling of Multi-Use Digital Instant Printing Camera Systems 09/113,085 IR12 Camera Picture Printing User Interface and Method 09/113,086 IR13 Method Integrating the Electronic Components of a Digital Printing Camera System 09/113,094 IR14 Method of Color Correction in a Digital Camera System 09/112,760 IR16 A Power Drive System for a Print on Demand Digital Camera System 09/112,773 IR17 Paper Guide System in a Print on Demand Digital Camera System 09/112,774 IR18 Guillotine System in a Print on Demand Digital Camera System 09/112,775 IR19 Ink jet Print Head Recapping Mechanism 09/112,745 IR20 Apparatus for Automated Photo Counting in a Print on Demand Digital Camera System 09/113,092 IR21 On Chip Clocking System for a Camera Device 09/113,100 MEMS02 Corrugated MEMS Heater Structure 09/113,093 MEMS03 Utilising Venting in a MEMS Liquid Pumping System 09/113,062 MEMS04 Clamping of Layers in a Multi-Layer MEMS Actuator 09/113,064 MEMS05 Utilisation of Quantum Wires in MEMS Actuators 09/113,082 MEMS06 Grill Structure for Filtering Fluids 09/113,081 MEMS07 Thermal Actuator 09/113,080 MEMS09 Utilisation of Air Bubbles in a MEMS Pumping System 09/113,079 MEMS10 Micro Cilia Array and Use Thereof 09/113,065 MEMS11 Utilisation of Barrier Layers in the Construction of a Micro Electro Mechanical System 09/113,078 MEMS12 Lever Arrangement for a Micro-Electro Mechanical System 09/113,075 MEMS13 Method of TAB Alignment in an Integrated Circuit Type Device

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

Not applicable.

FIELD OF THE INVENTION

The present invention relates to the field of inkjet printers and discloses an inkjet printing system which includes a bend actuator interconnected into a paddle for the ejection of ink through an ink ejection nozzle. In particular, the present invention includes a Method of Manufacture of a Thermally Actuated Ink Jet Including a Tapered Heater Element.

BACKGROUND OF THE INVENTION

Many different types of printing have been invented, a large number of which are presently in use. The known forms of printers have a variety of methods for marking the print media with a relevant marking media. Commonly used forms of printing include offset printing, laser printing and copying devices, dot matrix type impact printers, thermal paper printers, film recorders, thermal wax printers, dye sublimation printers and ink jet printers both of the drop on demand and continuous flow type. Each type of printer has its own advantages and problems when considering cost, speed, quality, reliability, simplicity of construction and operation etc.

In recent years, the field of ink jet printing, wherein each individual pixel of ink is derived from one or more ink nozzles has become increasingly popular primarily due to its inexpensive and versatile nature.

Many different techniques on ink jet printing have been invented. For a survey of the field, reference is made to an article by J Moore, “Non-Impact Printing: Introduction and Historical Perspective”, Output Hard Copy Devices, Editors R Dubeck and S Sherr, pages 207-220 (1988).

Ink Jet printers themselves come in many different types. The utilisation of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1,941,001 by Hansell discloses a simple form of continuous stream electrostatic ink jet printing.

U.S. Pat. No. 3,596,275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electrostatic field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3,373,437 by Sweet et al)

Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et al. in U.S. Pat. No. 3,946,398 (1970) which utilizes a diaphragm mode of operation, by Zolten in U.S. Pat. No. 3,683,212 (1970) which discloses a squeeze mode of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3,747,120 (1972) discloses a bend mode of piezoelectric operation, Howkins in U.S. Pat. No. 4,459,601 discloses a piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. Pat. No. 4,584,590 which discloses a sheer mode type of piezoelectric transducer element.

Recently, thermal ink jet printing has become an extremely popular form of ink jet printing. The ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4,4907,28. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media. Printing devices utilizing the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.

As can be seen from the foregoing, many different types of printing technologies are available. Ideally, a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.

In the construction of any inkjet printing system, there are a considerable number of important factors which must be traded off against one another especially as large scale printheads are constructed, especially those of a pagewidth type. A number of these factors are outlined in the following paragraphs.

Firstly, inkjet printheads are normally constructed utilising micro-electromechanical systems (MEMS) techniques. As such, they tend to rely upon the standard integrated circuit construction/fabrication techniques of depositing planar layers on a silicon wafer and etching certain portions of the planar layers. Within silicon circuit fabrication technology, certain techniques are more well known and others. For example, the techniques associated with the creation of CMOS circuits are likely to be more readily used than those associated with the creation of exotic circuits including ferroelectrics, gallium arsenide etc. Hence, it is desirable, in any MEMS constructions, to utilise well proven semi-conductor fabrication techniques which do not require the utilisation of any “exotic” processes or materials. Of course, a certain degree of trade off will be undertaken in that if the use of the exotic material far out weighs its disadvantages then it may become desirable to utilise the material anyway.

With a large array of ink ejection nozzles, it is desirable to provide for a highly automated form of manufacturing which results in an inexpensive production of multiple printhead devices.

Preferably, the device constructed utilises a low amount of energy in the ejection of ink. The utilisation of a low amount of energy is particularly important when a large pagewidth full color printhead is constructed having a large array of individual print ejection mechanisms with each ejection mechanism, in the worst case, being fired in a rapid sequence.

Unfortunately, in mass production techniques, the production of ink jet heads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)). These separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.

Additionally, side shooting ink jet technologies (U.S. Pat. No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.

Additionally, more esoteric techniques are also often utilised. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Pat. No. 5,208,604), micro-punching, etc.

The utilisation of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.

It would therefore be desirable if an efficient system for the mass production of ink jet print heads could be developed.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide for a method of manufacture of an ink ejection nozzle arrangement suitable for incorporation into an inkjet printhead arrangement for the ejection of ink on demand from a nozzle chamber in an efficient manner.

In accordance with a first aspect of the present invention, there is provided a method of manufacture of an ink jet printing nozzle arrangement on a wafer, the arrangement including: an ink chamber having an ink ejection nozzle in one wall thereof for the ejection of ink from the ink chamber; a moveable paddle vane located within the ink chamber, the paddle vane including a concave surface in the area adjacent the ink ejection nozzle; and an actuator means adapted to move the paddle vane so as to cause ink within the ink chamber to be ejected from the ink ejection nozzle; the method comprising the steps of:

(a) starting with a silicon wafer layer having requisite circuitry deposited thereon;

(b) depositing and etching a first sacrificial layer to form a cavity for the paddle vane and a portion of the nozzle chamber;

(c) depositing and etching a series of layers simultaneously forming the operational portions of the actuator means and the paddle vane;

(d) depositing a second sacrificial layer forming a cavity for the ink chamber walls and remaining portions (if any) of the actuator;

(e) depositing the chamber walls and remaining portions of the actuator;

(f) forming a nozzle chamber roof including an ink ejection nozzle;

(g) etching the sacrificial layers away.

Preferably, the step (c) includes utilizing a single mask to etch the layers and step (c) further includes depositing two layers of substantially the same thermal properties, one of the layers including an operational portion of the actuator, such that, upon cooling of the layers, the two layers are in a state of thermal tension between one other.

BRIEF DESCRIPTION OF THE DRAWINGS

Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:

FIGS. 1-3 illustrate the operational principles of the preferred embodiment,

FIG. 4 is a side perspective view of a single nozzle arrangement of the preferred embodiment;

FIG. 5 illustrates a side sectional view of a single nozzle arrangement;

FIGS. 6 and 7 illustrate operational principles of the preferred embodiment;

FIGS. 8-15 illustrate the manufacturing steps in the construction of the preferred embodiment;

FIG. 16 illustrates a top plan view of a single nozzle;

FIG. 17 illustrates a portion of a single color printhead device;

FIG. 18 illustrates a portion of a three color printhead device;

FIG. 19 provides a legend of the materials indicated in FIGS. 20 to 29; and

FIG. 20 to FIG. 29 illustrate sectional views of the manufacturing steps in one form of construction of an ink jet printhead nozzle.

DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS

In the preferred embodiment, there is provided a nozzle chamber having ink within it and a thermal actuator device interconnected to a panel the thermal actuator device being actuated so as to eject ink from the nozzle chamber. The preferred embodiment includes a particular thermal actuator structure which includes a tapered heater structure arm for providing positional heating of a conductive heater layer row. The actuator arm is interconnected to a paddle by a slotted wall in the nozzle chamber. The actuator arm has a mating shape so as to mate substantially with the surfaces of the slot in the nozzle chamber wall.

Turning initially to FIG. 1-3, there is provided schematic illustrations of the basic operation of the device. A nozzle chamber 1 is provided filled with ink 2 by means of an ink inlet channel 3 which can be etched through a wafer substrate on which the nozzle chamber 1 rests. The nozzle chamber 1 includes an ink ejection aperture 4 around which an ink meniscus forms.

Inside the nozzle chamber 1 is a paddle type device 7 which is interconnected to an actuator arm 8 through a slot in the wall of the nozzle chamber 1. The actuator arm 8 includes a heater means eg. 9 located adjacent to a post end portion 10 of the actuator arm. The post 10 is fixed to a substrate.

When it is desired to eject a drop from the nozzle chamber, as illustrated in FIG. 2, the heater means 9 is heated so as to undergo thermal expansion. Preferably, the heater means itself or the other portions of the actuator arm 8 are built from materials having a high bend efficiency where the bend efficiency is defined as $\text{bend~~efficiency} = \frac{{\text{Young’s~~Modulus} \times \text{(Coefficient~~of~~thermal~~Expansion)}}\quad}{\text{Density} \times \text{Specific~~Heat Capacity}}$

A suitable material for the heater elements is a copper nickel alloy which can be formed so as to bend a glass material.

The heater means is ideally located adjacent the post end portion 10 such that the effects of activation are magnified at the paddle end 7 such that small thermal expansions near post 10 result in large movements of the paddle end. The heating 9 causes a general increase in pressure around the ink meniscus 5 which expands, as illustrated in FIG. 2, in a rapid manner. The heater current is pulsed and ink is ejected out of the nozzle 4 in addition to flowing in from the ink channel 3. Subsequently, the paddle 7 is deactivated to again return to its quiescent position. The deactivation causes a general reflow of the ink into the nozzle chamber. The forward momentum of the ink outside the nozzle rim and the corresponding backflow results in a general necking and breaking off of the drop 12 which proceeds to the print media. The collapsed meniscus 5 results in a general sucking of ink into the nozzle chamber 2 via the in flow channel 3. In time, the nozzle chamber is refilled such that the position in FIG. 1 is again reached and the nozzle chamber is subsequently ready for the ejection of another drop of ink.

Turning now to FIG. 4, there is illustrated a single nozzle arrangement 20 of the preferred embodiment. The arrangement includes an actuator arm 21 which includes a bottom arm 22 which is constructed from a conductive material such as a copper nickel alloy (hereinafter called cupronickel) or titanium nitride (TiN). The layer 22, as will become more apparent hereinafter includes a tapered end portion near the end post 24. The tapering of the layer 22 near this end means that any conductive resistive heating occurs near the post portion 24.

The layer 22 is connected to the lower CMOS layers 26 which are formed in the standard manner on a silicon substrate surface 27. The actuator arm 21 is interconnected to an ejection paddle which is located within a nozzle chamber 28. The nozzle chamber includes an ink ejection nozzle 29 from which ink is ejected and includes a convoluted slot arrangement 30 which is constructed such that the actuator arm 21 is able to move up and down whilst causing minimal pressure fluctuations in the area of the nozzle chamber 28 around the slotted interconnect 30.

FIG. 5 illustrates a sectional view through a single nozzle. FIG. 5 illustrates more clearly the internal structure of the nozzle chamber which includes the paddle 32 attached to the actuator arm 21 by means of arm 33. Importantly, the actuator arm 21 includes, as noted previously, a bottom conductive strip portion 22. Additionally, a second top strip portion 25 is also provided.

The utilization of a second layer 25 of the same material as the first layer 22 allows for more accurate control of the actuator position as will be described with reference to FIGS. 6 and 7. In FIG. 6, there is illustrated the example where a high Young's Modulus material 40 is deposited utilizing standard semiconductor deposition techniques and on top of which is further deposited a second layer 41 having a much lower Young's Modulus. Unfortunately, the deposition is likely to occur at a high temperature. Upon cooling, the two layers are likely to have different coefficients of thermal expansion and different Young's Modulus. Hence, in ambient room temperature, the thermal stresses are likely to cause bending of the two layers of material as shown 42.

By utilizing a second deposition of the material having a high Young's Modulus, the situation in FIG. 7 is likely to result wherein the material 41 is sandwiched between the two layers 40. Upon cooling, the two layers 40 are kept in tension with one another so as to result in a more planar structure 45 regardless of the operating temperature. This principle is utilized in the deposition of the two layers 22, 25 of FIGS. 4-5.

Turning again to FIGS. 4 and 5, one important attribute of the preferred embodiments includes the slotted arrangement 30. The slotted arrangement results in the actuator arm 21 moving up and down thereby causing the paddle 32 to also move up and down resulting in the ejection of ink. The slotted arrangement 30 results in minimum ink outflow through the actuator arm interconnection and also results in minimal pressure increases in this area. The base 33 of the actuator arm is extended out so as to form an extended interconnect with the paddle surface thereby providing for better attachment. The face 33 is connected to a block arm 36 which is provided to provide a high degree of rigidity. The actuator arm 36 and the wall of the nozzle chamber 28 have a general corrugated nature so as to reduce any flow of ink through the interconnection. The exterior surface of the nozzle chamber adjacent the block portion 36 has a rim eg. 38 so to minimize wicking of ink outside of the nozzle chamber. A pit 37 is also provided for this purpose. The pit 37 is formed in the lower CMOS layers 26. An ink supply channel 39 is provided by means of back etching through the wafer to the back surface of the nozzle.

Turning now to FIGS. 8-15 there will now be described the manufacturing steps utilizing the construction of a single nozzle in accordance with the preferred embodiment.

The manufacturing uses standard micro-electro mechanical techniques. For a general introduction to a micro-electro mechanical system (MEMS) reference is made to standard proceedings in this field including the proceeding of the SPIE (International Society for Optical Engineering) including volumes 2642 and 2882 which contain the proceedings of recent advances and conferences in this field.

1. The preferred embodiment starts with a double sided polished wafer complete with, say, a 0.2 μm 1 poly 2 metal CMOS process providing for all the electrical interconnects necessary to drive the inkjet nozzle.

2. As shown in FIG. 8, the CMOS wafer is etched 50 down to the silicon layer 27. The etching includes etching down to an aluminum CMOS layer 51, 52.

3. Next, as illustrated in FIG. 9, a 1 μm layer of sacrificial material 55 is deposited. The sacrificial material can be aluminum or photosensitive polyimide.

4. The sacrificial material is etched in the case of aluminum or exposed and developed in the case of polyimide in the area of the nozzle rim 56 and including a depressed paddle area 57.

5. Next, a 1 μm layer of heater material (cupronickel or TiN) is deposited 60.

6. A 3.4 μm layer of PECVD glass 61 is then deposited.

7. A second layer 62 equivalent to the first layer 60 is then deposited.

8. All three layers 60-62 are then etched utilizing the same mask. The utilization of a single mask substantially reduces the complexity in the processing steps involved in creation of the actuator paddle structure and the resulting structure is as illustrated in FIG. 10. Importantly, a break 63 is provided so as to ensure electrical isolation of the heater portion from the paddle portion.

9. Next, as illustrated in FIG. 11, a 10 μm layer of sacrificial material 70 is deposited.

10. The deposited layer is etched (or just developed if polyimide) utilizing a fourth mask which includes nozzle rim etchant holes 71 block portion holes 72 and post portion 73.

11. Next a 10 μm of PCVD glass is deposited so as to form the nozzle rim 71, arm portions 72 and post portions 73.

12. The glass layer is then planarized utilizing chemical mechanical planarization (CMP) with the resulting structure as illustrated in FIG. 11.

13. Next, as illustrated in FIG. 11, a 3 μm layer of PECVD glass is deposited.

14. The deposited glass is then etched as shown in FIG. 12, to a depth of approximately 1 μm so as to form nozzle rim portion 81 and actuator interconnect portion 82.

15. Next, as illustrated in FIG. 13, the glass layer is etched utilizing a 6th mask so as to form final nozzle rim portion 81 and actuator guide portion 82.

16. Next, as illustrated in FIG. 14, the ink supply channel is back etched 85 from the back of the wafer utilizing a 7th mask. The etch can be performed utilizing a high precision deep silicon trench etcher such as the STS Advanced Silicon Etcher (ASE). This step can also be utilized to nearly completely dice the wafer.

17. Next, as illustrated in FIG. 15 the sacrificial material can be stripped or dissolved to also complete dicing of the wafer in accordance with requirements.

18. Next, the printheads can be individually mounted on attached molded plastic ink channels to supply ink to the ink supply channels.

19. The electrical control circuitry and power supply can then be bonded to an etch of the printhead with a TAB film.

20. Generally, if necessary, the surface of the printhead is then hydrophobized so as to ensure minimal wicking of the ink along external surfaces. Subsequent testing can determine operational characteristics.

Importantly, as shown in the plan view of FIG. 16, the heater element has a tapered portion adjacent the post 73 so as to ensure maximum heating occurs near the post.

Of course, different forms of inkjet printhead structures can be formed. For example, there is illustrated in FIG. 17, a portion of a single color printhead having two spaced apart rows 90, 91, with the two rows being interleaved so as to provide for a complete line of ink to be ejected in two stages. Preferably, a guide rail 92 is provided for proper alignment of a TAB film with bond pads 93. A second protective barrier 94 can also preferably be provided. Preferably, as will become more apparent with reference to the description of FIG. 18 adjacent actuator arms are interleaved and reversed.

Turning now to FIG. 18, there is illustrated a full color printhead arrangement which includes three series of inkjet nozzles 95, 96, 97 one each devoted to a separate color. Again, guide rails 98, 99 are provided in addition to bond pads, eg. 100. In FIG. 18, there is illustrated a general plan of the layout of a portion of a full color printhead which clearly illustrates the interleaved nature of the actuator arms.

The presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with in-built pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic “minilabs”, video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.

One alternative form of detailed manufacturing process which can be used to fabricate monolithic ink jet print heads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:

1. Using a double sided polished wafer, complete drive transistors, data distribution, and timing circuits using a 0.5 micron, one poly, 2 metal CMOS process. Relevant features of the wafer at this step are shown in FIG. 20. For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 19 is a key to representations of various materials in these manufacturing diagrams, and those of other cross referenced ink jet configurations.

2. Etch oxide down to silicon or aluminum using Mask 1. This mask defines the nozzle chamber, the surface anti-wicking notch, and the heater contacts. This step is shown in FIG. 21.

3. Deposit 1 micron of sacrificial material (e.g. aluminum or photosensitive polyimide).

4. Etch (if aluminum) or develop (if photosensitive polyimide) the sacrificial layer using Mask 2. This mask defines the nozzle chamber walls and the actuator anchor point. This step is shown in FIG. 22.

5. Deposit 1 micron of heater material (e.g. cupronickel or TiN). If cupronickel, then deposition can consist of three steps—a thin anti-corrosion layer of, for example, TiN, followed by a seed layer, followed by electroplating of the 1 micron of cupronickel.

6. Deposit 3.4 microns of PECVD glass.

7. Deposit a layer identical to step 5.

8. Etch both layers of heater material, and glass layer, using Mask 3. This mask defines the actuator, paddle, and nozzle chamber walls. This step is shown in FIG. 23.

9. Wafer probe. All electrical connections are complete at this point, bond pads are accessible, and the chips are not yet separated.

10. Deposit 10 microns of sacrificial material.

11. Etch or develop sacrificial material using Mask 4. This mask defines the nozzle chamber wall. This step is shown in FIG. 24.

12. Deposit 3 microns of PECVD glass.

13. Etch to a depth of (approx.) 1 micron using Mask 5. This mask defines the nozzle rim. This step is shown in FIG. 25.

14. Etch down to the sacrificial layer using Mask 6. This mask defines the roof of the nozzle chamber, and the nozzle itself. This step is shown in FIG. 26.

15. Back-etch completely through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 7. This mask defines the ink inlets which are etched through the wafer. The wafer is also diced by this etch. This step is shown in FIG. 27.

16. Etch the sacrificial material. The nozzle chambers are cleared, the actuators freed, and the chips are separated by this etch. This step is shown in FIG. 28.

17. Mount the print heads in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink to the ink inlets at the back of the wafer.

18. Connect the print heads to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.

19. Hydrophobize the front surface of the print heads.

20. Fill the completed print heads with ink and test them. A filled nozzle is shown in FIG. 29.

It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. The present embodiments are, therefore, to be considered in all respects to be illustrative and not restrictive.

Ink Jet Technologies

The embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.

The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.

The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewidth print heads with 19,200 nozzles.

Ideally, the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications. To meet the requirements of digital photography, new inkjet technologies have been created. The target features include:

low power (less than 10 Watts)

high resolution capability (1,600 dpi or more)

photographic quality output

low manufacturing cost

small size (pagewidth times minimum cross section)

high speed (<2 seconds per page).

All of these features can be met or exceeded by the inkjet systems described below with differing levels of difficulty. Forty-five different inkjet technologies have been developed by the Assignee to give a wide range of choices for high volume manufacture. These technologies form part of separate applications assigned to the present Assignee as set out in the table below.

The inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems

For ease of manufacture using standard process equipment, the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing. For color photographic applications, the print head is 100 mm long, with a width which depends upon the inkjet type. The smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm. The print heads each contain 19,200 nozzles plus data and control circuitry.

Ink is supplied to the back of the print head by injection molded plastic ink channels. The molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool. Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer. The print head is connected to the camera circuitry by tape automated bonding.

Tables of Drop-on-Demand Ink Jets

The present invention is useful in the field of digital printing, in particular, ink jet printing. A number of patent applications in this field were filed simultaneously and incorporated by cross reference.

Eleven important characteristics of the fundamental operation of individual ink jet nozzles have been identified. These characteristics are largely orthogonal, and so can be elucidated as an eleven dimensional matrix. Most of the eleven axes of this matrix include entries developed by the present assignee.

The following tables form the axes of an eleven dimensional table of ink jet types.

Actuator mechanism (18 types)

Basic operation mode (7 types)

Auxiliary mechanism (8 types)

Actuator amplification or modification method (17 types)

Actuator motion (19 types)

Nozzle refill method (4 types)

Method of restricting back-flow through inlet (10 types)

Nozzle clearing method (9 types)

Nozzle plate construction (9 types)

Drop ejection direction (5 types)

Ink type (7 types)

The complete eleven dimensional table represented by these axes contains 36.9 billion possible configurations of ink jet nozzle. While not all of the possible combinations result in a viable ink jet technology, many million configurations are viable. It is clearly impractical to elucidate all of the possible configurations. Instead, certain ink jet types have been investigated in detail. These are designated IJ01 to IJ45 which matches the docket numbers in the in the table under the heading Cross References to Related Applications.

Other ink jet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes. Most of the IJ01 to IJ45 examples can be made into ink jet print heads with characteristics superior to any currently available ink jet technology.

Where there are prior art examples known to the inventor, one or more of these examples are listed in the examples column of the tables below. The IJ01 to IJ45 series are also listed in the examples column. In some cases, a printer may be listed more than once in a table, where it shares characteristics with more than one entry.

Suitable applications for the ink jet technologies include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.

The information associated with the aforementioned 11 dimensional matrix are set out in the following tables.

Description Advantages Disadvantages Examples ACTUATOR MECHANISM (APPLIED ONLY TO SELECTED INK DROPS) Thermal An electrothermal Large force High power Canon Bubblejet bubble heater heats the ink to generated Ink carrier limited to 1979 Endo et al GB above boiling point, Simple Construction water patent 2,007,162 transferring significant No moving parts Low efficiency Xerox heater-in-pit heat to the aqueous Fast operation High temperatures 1990 Hawkins et al ink. A bubble Small chip area required USP 4,899,181 nucleates and quickly required for actuator High mechanical Hewlett-Packard TIJ forms, expelling the stress 1982 Vaught et al ink. Unusual materials USP 4,490,728 The efficiency of the required process is low, with Large drive typically less than transistors 0.05% of the electrical Cavitation causes energy being actuator failure transformed into Kogation reduces kinetic energy of the bubble formation drop. Large print heads are difficult to fabricate Piezo- A piezoelectric crystal Low power Very large area Kyser et al USP electric such as lead consumption required for actuator 3,946,398 lanthanum zirconate Many ink types can Difficult to integrate Zoltan USP (PZT) is electrically be used with electronics 3,683,212 activated, and either Fast operation High voltage drive 1973 Stemme USP expands, shears, or High efficiency transistors required 3,747,120 bends to apply Full pagewidth print Epson Stylus pressure to the ink, heads impractical Tektronix ejecting drops. due to actuator size IJ04 Requires electrical poling in high field strengths during manufacture Electro- An electric field is Low power Low maximum Seiko Epson, Usui strictive used to activate consumption strain (approx. et all JP 253401/96 electrostriction in Many ink types can 0.01%) IJ04 relaxor materials such be used Large area required as lead lanthanum Low thermal for actuator due to zirconate titanate expansion low strain (PLZT) or lead Electric field Response speed is magnesium niobate strength required marginal (˜10 μs) (PMN). (approx. 3.5 V/μm) High voltage drive can be generated transistors required without difficulty Full pagewidth print Does not require heads impractical electrical poling due to actuator size Ferro- An electric field is Low power Difficult to integrate IJ04 electric used to induce a phase consumption with electronics transition between the Many ink types can Unusual materials antiferroelectric (AFE) be used such as PLZSnT are and ferroelectric (FE) Fast operation required phase. Perovskite (<1 μs) Actuators require a materials such as tin Relatively high large area modified lead longitudinal strain lanthanum zirconate High efficiency titanate (PLZSnT) Electric field exbibit large strains of strength of around 3 up to 1% associated V/μm can be readily with the AFE to FE provided phase transition. Electro- Conductive plates are Low power Difficult to operate IJ02, IJ04 static separated by a consumption electrostatic devices plates compressible or fluid Many ink types can in an aqueous dielectric (usually air). be used environment Upon application of a Fast operation The electrostatic voltage, the plates actuator will attract each other and normally need to be displace ink, causing separated from the drop ejection. The ink conductive plates may Very large area be in a comb or required to achieve honeycomb structure, high forces or stacked to increase High voltage drive the surface area and transistors may be therefore the force. required Full pagewidth print heads are not competitive due to actuator size Electro- A strong electric field Low current High voltage 1989 Saito et al, static pull is applied to the ink, consumption required USP 4,799,068 on ink whereupon Low temperature May be damaged by 1989 Miura et al, electrostatic attraction sparks due to air USP 4,810,954 accelerates the ink breakdown Tone-jet towards the print Required field medium. strength increases as the drop size decreases High voltage drive transistors required Electrostatic field attracts dust Permanent An electromagnet Low power Complex fabrication IJ07, IJ10 magnet directly attracts a consumption Permanent magnetic electro- permanent magnet, Many ink types can material such as magnetic displacing ink and be used Neodymium Iron causing drop ejection. Fast operation Boron (NdFeB) Rare earth magnets High efficiency required. with a field strength Easy extension from High local currents around 1 Tesla can be single nozzles to required used. Examples are: pagewidth print Copper metalization Samarium Cobalt heads should be used for (SaCo) and magnetic long materials in the electromigration neodymium iron boron lifetime and low family (NdFeB, resistivity NdDyFeBNb, Pigmented inks are NdDyFeB, etc) usually infeasible Operating temperature limited to the Curie temperature (around 540 K.) Soft A solenoid induced a Low power Complex fabrication IJ01, 1J05, 1J08, magnetic magnetic field in a soft consumption Materials not IJ10, IJI2, IJ14, core magnetic core or yoke Many ink types can usually present in a IJ15, IJ17 electro- fabricated from a be used CMOS fab such as magnetic ferrous material such Fast operation NiFe, CoNiFe, or as electroplated iron High efficiency CoFe are required alloys such as CoNiFe Easy extension from High local currents [1], CoFe, or NiFe single nozzles to required alloys. Typically, the pagewidth print Copper metalization soft magnetic material heads should be used for is in two parts, which long are normally held electromigration apart by a spring. lifetime and low When the solenoid is resistivity actuated, the two parts Electroplating is attract, displacing the required ink. High saturation flux density is required 2.0-2.1 T is achievable with CoNiFe [1]) Lorenz The Lorenz force Low power Force acts as a IJ06, IJ11, IJ13, force acting on a current consumption twisting motion IJ16 carrying wire in a Many ink types can Typically, only a magnetic field is be used quarter of the utilized. Fast operation solenoid length This allows the High efficiency provides force in a magnetic field to be Easy extension from useful direction supplied externally to single nozzles to High local currents the print head, for pagewidth print required example with rare heads Copper metalization earth permanent should be used for magnets. long Only the current electromigration carrying wire need be lifetime and low fabricated on the print- resistivity head, simplifying Pigmented inks are materials usually infeasible requirements. Magneto- The actuator uses the Many ink types can Force acts as a Fischenbeck, USP striction giant magnetostrictive be used twisting motion 4,032,929 effect of materials Fast operation Unusual materials IJ25 such as Terfenol-D (an Easy extension from such as Terfenol-D alloy of terbium, single nozzles to are required dysprosium and iron pagewidth print High local currents developed at the Naval heads required Ordnance Laboratory, High force is Copper metalization hence Ter-Fe-NOL). available should be used for For best efficiency, the long actuator should be pre- electromigration stressed to approx. 8 lifetime and low MPa. resistivity Pre-stressing may be required Surface Ink under positive Low power Requires Silverbrook, EP tension pressure is held in a consumption supplementary force 0771 658 A2 and reduction nozzle by surface Simple construction to effect drop related patent tension. The surface No unusual separation applications tension of the ink is materials required in Requires special ink reduced below the fabrication surfactants bubble threshold, High efficiency Speed may be causing the ink to Easy extension from limited by surfactant egress from the single nozzles to properties nozzle. pagewidth print heads Viscosity The ink viscosity is Simple Construction Requires Silverbrook, EP reduction locally reduced to No unusual supplementary force 0771 658 A2 and select which drops are materials required in to effect drop related patent to be ejected. A fabrication separation applications viscosity reduction can Easy extension from Requires special ink be achieved single nozzles to viscosity properties electrothermally with pagewidth print High speed is most inks, but special heads difficult to achieve inks can be engineered Requires oscillating for a 100:1 viscosity ink pressure reduction. A high temperature difference (typically 80 degrees) is required Acoustic An acoustic wave is Can operate without Complex drive 1993 Hadimioglu et generated and a nozzle plate circuitry al, EUP 550,192 focussed upon the Complex fabrication 1993 Elrod et al, drop ejection region. Low efficiency EUP 572,220 Poor control of drop position Poor control of drop volume Thermo- An actuator which Low power Efficient aqueous IJ03, IJ09, IJ17, elastic relies upon differential consumption operation requires a IJ18, IJ19, IJ20, bend thermal expansion Many ink types can thermal insulator on IJ21, IJ22, IJ23, actuator upon Joule heating is be used the hot side IJ24, IJ27, IJ28, used. Simple planar Corrosion IJ29, IJ30, IJ31, fabrication prevention can be IJ32, IJ33, IJ34, Small chip area difficult IJ35, 1J36, 1J37, required for each Pigmented inks may IJ38 ,1J39, 1J40, actuator be infeasible, as IJ41 Fast operation pigment particles High efficiency may jam the bend CMOS compatible actuator voltages and currents Standard MEMS processes can be used Easy extension from single nozzles to pagewidth print heads High CTE A material with a very High force can be Requires special IJ09, IJ17, IJ18, thermo- high coefficient of generated material (e.g. PTFE) IJ20, IJ21, IJ22, elastic thermal expansion Three methods of Requires a PTFE IJ23, IJ24, IJ27, actuator (CTE) sucb as PTFE deposition are deposition process, IJ28, IJ29, IJ30, polytetrafluoroethylene under development: which is not yet IJ31, 1342, IJ43, (PTFE) is used. As chemical vapor standard in ULSI IJ44 high CTE materials deposition (CVD), fabs are usually non- spin coating, and PTFE deposition conductive, a heater evaporation cannot be followed fabricated from a PTFE is a candidate with high conductive material is for low dielectric temperature (above incorporated. A 50 μm constant insulation 350° C.) processing long PTFE bend in ULSI Pigmented inks may actuator with Very low power be infeasible, as polysilicon heater and consumption pigment particles 15 mW power input Many ink types can may jam the bend can provide 180 μN be used actuator force and 10 μm Simple planar deflection. Actuator fabrication motions include: Small chip area Bend required for each Push actuator Buckle Fast operation Rotate High efficiency CMOS compatible voltages and currents Easy extension from single nozzles to pagewidth print heads Conduct- A polymer with a high High force can be Requires special IJ24 ive coefficient of thermal generated materials polymer expansion (such as Very low power development (High thermo- PTFE) is doped with consumption CTE conductive elastic conducting substances Many ink types can polymer) actuator to increase its be used Requires a PTFE conductivity to about 3 Simple planar deposition process, orders of magnitude fabrication which is not yet below that of copper. Small chip area standard in ULSI The conducting required for each fabs polymer expands actuator PTFE deposition when resistively Fast operation cannot be followed heated. High efficiency with high Examples of CMOS compatible temperature (above conducting dopants voltages and 350° C.) processing include: currents Evaporation and Carbon nanotubes Easy extension from CVD deposition Metal fibers single nozzles to techniques cannot Conductive polymers pagewidth print be used such as doped heads Pigmented inks may polythiophene be infeasible, as Carbon granules pigment particles may jam the bend actuator Shape A shape memory alloy High force is Fatigue limits IJ26 memory such as TiNi (also available (stresses maximum number alloy known as Nitinol - of hundreds of MPa) of cycles Nickel Titanium alloy Large strain is Low strain (1%) is developed at the Naval available (more than required to extend Ordnance Laboratory) 3%) fatigue resistance is thermally switched High corrosion Cycle rate limited between its weak resistance by heat removal martensitic state and Simple construction Requires unusual its high stiffness Easy extension from materials (TiNi) austenic state. The single nozzles to The latent heat of shape of the actuator pagewidth print transformation must in its martensitic state heads be provided is deformed relative to Low voltage High current the austenic shape. operation operation The shape change Requires pre- causes ejection of a stressing to distort drop. the martensitic state Linear Linear magnetic Linear Magnetic Requires unusual IJ12 Magnetic actuators include the actuators can be semiconductor Actuator Linear Induction constructed with materials such as Actuator (LIA), Linear high thrust, long soft magnetic alloys Permanent Magnet travel, and high (e.g. CoNiFe) Synchronous Actuator efficiency using Some varieties also (LPMSA), Linear planar require permanent Reluctance semiconductor magnetic materials Synchronous Actuator fabrication such as Neodymium (LRSA), Linear techniques iron boron (NdFeB) Switched Reluctance Long actuator travel Requires complex Actuator (LSRA), and is available multi-phase drive the Linear Stepper Medium force is circuitry Actuator (LSA). available High current Low voltage operation operation BASIC OPERATION MODE Actuator This is the simplest Simple operation Drop repetition rate Thermal ink jet directly mode of operation: the No external fields is usually limited to Piezoelectric ink jet pushes ink actuator directly required around 10 kHz. IJ01, IJ02, IJ03, supplies sufficient Satellite drops can However, this is not IJ04, IJ05, IJ06, kinetic energy to expel be avoided if drop fundamental to the IJ07, IJ09, IJ11, the drop. The drop velocity is less than method, but is IJ12, IJ14, IJ16, must have a sufficient 4 m/s related to the refill IJ20, IJ22, IJ23, velocity to overcome Can be efficient, method normally IJ24, IJ25, IJ26, the surface tension. depending upon the used IJ27, IJ28, IJ29, actuator used All of the drop IJ30, IJ31, IJ32, kinetic energy must IJ33, IJ34, IJ35, be provided by the IJ36, IJ37, IJ38, actuator IJ39, IJ40, IJ41, Satellite drops IJ42, IJ43, IJ44 usually form if drop velocity is greater than 4.5 m/s Proximity The drops to be Very simple print Requires close Silverbrook, EP printed are selected by head fabrication can proximity between 0771 658 A2 and some manner (e.g. be used the print head and related patent thermally induced The drop selection the print media or applications surface tension means does not need transfer roller reduction of to provide the May require two pressurized ink). energy required to print heads printing Selected drops are separate the drop alternate rows of the separated from the ink from the nozzle image in the nozzle by Monolithic color contact with the print print heads are medium or a transfer difficult roller. Electro- The drops to be Very simple print Requires very high Silverbrook, EP static pull printed are selected by head fabrication can electrostatic field 077 1658 A2 and on ink some manner (e.g. be used Electrostatic field related patent thermally induced The drop selection for small nozzle applications surface tension means does not need sizes is above air Tone-Jet reduction of to provide the breakdown pressurized ink). energy required to Electrostatic field Selected drops are separate the drop may attract dust separated from the ink from the nozzle in the nozzle by a strong electric field. Magnetic The drops to be Very simple print Requires magnetic Silverbrook, EP pull on ink printed are selected by head fabrication can ink 0771 658 A2 and some manner (e.g. be used Ink colors other than related patent thermally induced The drop selection black are difficult applications surface tension means does not need Requires very high reduction of to provide the magnetic fields pressurized ink). energy required to Selected drops are separate the drop separated from the ink from the nozzle in the nozzle by a strong magnetic field acting on the magnetic ink. Shutter The actuator moves a High speed (>50 Moving parts are IJ13, IJ17, IJ21 shutter to block ink kHz) operation can required flow to the nozzle. The be achieved due to Requires ink ink pressure is pulsed reduced refill time pressure modulator at a multiple of the Drop timing can be Friction and wear drop ejection very accurate must be considered frequency. The actuator energy Stiction is possible can be very low Shuttered The actuator moves a Actuators with Moving parts are IJ08, IJ15, IJ18, grill shutter to block ink small travel can be required IJ19 flow through a grill to used Requires ink the nozzle. The shutter Actuators with pressure modulator movement need only small force can be Friction and wear be equal to the width used must be considered of the grill holes. High speed (>50 Stiction is possible kHz) operation can be achieved Pulsed A pulsed magnetic Extremely low Requires an external IJ10 magnetic field attracts an ‘ink energy operation is pulsed magnetic pull on ink pusher’ at the drop possible field pusher ejection frequency. An No heat dissipation Requires special actuator controls a problems materials for both catch, which prevents the actuator and the the ink pusher from ink pusher moving when a drop is Complex not to be ejected. construction AUXILIARY MECHANISM (APPLIED TO ALL NOZZLES) None The actuator directly Simplicity of Drop ejection Most ink jets, fires the ink drop, and construction energy must be including there is no external Simplicity of supplied by piezoelectric and field or other operation individual nozzle thermal bubble. mechanism required. Small physical size actuator IJ01, IJ02, IJ03, IJ04, IJ05, IJ07, IJ09, IJ11, IJ12, IJ14, IJ20, IJ22, IJ23, IJ24, IJ25, IJ26, IJ27, IJ28, IJ29, IJ30, IJ31, IJ32, IJ33, IJ34, IJ35, IJ36, IJ37, IJ38, IJ39, IJ40, IJ41, IJ42, IJ43, IJ44 Oscillating The ink pressure Oscillating ink Requires external Silverbrook, EP ink oscillates, providing pressure can provide ink pressure 0771 658 A2 and pressure much of the drop a refill pulse, oscillator related patent (including ejection energy. The allowing higher Ink pressure phase applications acoustic actuator selects which operating speed and amplitude must IJ08, IJ13, IJ15, stimula- drops are to be fired The actuators may be carefully IJ17, IJ18, IJ19, tion) by selectively operate with much controlled IJ21 blocking or enabling lower energy Acoustic reflections nozzles. The ink Acoustic lenses can in the ink chamber pressure oscillation be used to focus the must be designed may be achieved by sound on the for vibrating the print nozzles head, or preferably by an actuator in the ink supply. Media The print head is Low power Precision assembly Silverbrook, EP proximity placed in close High accuracy required 0771 658 A2 and proximity to the print Simple print head Paper fibers may related patent medium. Selected construction cause problems applications drops protrude from Cannot print on the print head further rough substrates than unselected drops, and contact the print medium. The drop soaks into the medium fast enough to cause drop separation. Transfer Drops are printed to a High accuracy Bulky Silverbrook, EP roller transfer roller instead Wide range of print Expensive 0771 658 A2 and of straight to the print substrates can be Complex related patent medium. A transfer used construction applications roller can also be used Ink can be dried on Tektronix hot melt for proximity drop the transfer roller piezoelectric ink jet separation. Any of the IJ series Electro- An electric field is Low power Field strength Silverbrook, EP static used to accelerate Simple print head required for 0771 658 A2 and selected drops towards construction separation of small related patent the print medium. drops is near or applications above air Tone-Jet breakdown Direct A magnetic field is Low power Requires magnetic Silverbrook, EP magnetic used to accelerate Simple print head ink 0771 658 A2 and field selected drops of construction Requires strong related patent magnetic ink towards magnetic field applications the print medium. Cross The print head is Does not require Requires external IJ06, IJ16 magnetic placed in a constant magnetic materials magnet field magnetic field. The to be integrated in Current densities Lorenz force in a the print head may be high, current carrying wire manufacturing resulting in is used to move the process electromigration actuator. problems Pulsed A pulsed magnetic Very low power Complex print head IJ10 magnetic field is used to operation is possible construction field cyclically attract a Small print head Magnetic materials paddle, which pushes size required in print on the ink. A small head actuator moves a catch, which selectively prevents the paddle from moving. ACTUATOR AMPLIFICATION OR MODIFICATION METHOD None No actuator Operational Many actuator Thermal Bubble Ink mechanical simplicity mechanisms have jet amplification is used. insufficient travel, IJ01, IJ02, IJ06, The actuator directly or insufficient force, IJ07, IJ16, IJ25, drives the drop to efficiently drive IJ26 ejection process. the drop ejection process Differential An actuator material Provides greater High stresses are Piezoelectric expansion expands more on one travel in a reduced involved IJ03, IJ09, 1J17, bend side than on the other. print head area Care must be taken IJ18, IJ19, IJ20, actuator The expansion may be that the materials do IJ21, IJ22, IJ23, thermal, piezoelectric, not delaminate IJ24, IJ27, IJ29, magnetostrictive, or Residual bend IJ30, IJ31, IJ32, other mechanism. The resulting from high IJ33, IJ34, IJ35, bend actuator converts temperature or high IJ36, IJ37, IJ38, a high force low travel stress during IJ39, IJ42, IJ43, actuator mechanism to formation IJ44 high travel, lower force mechanism. Transient A trilayer bend Very good High stresses are IJ40, IJ41 bend actuator where the two temperature stability involved actuator outside layers are High speed, as a Care must be taken identical. This cancels new drop can be that the materials do bend due to ambient fired before heat not delaminate temperature and dissipates residual stress. The Cancels residual actuator only responds stress of formation to transient heating of one side or the other. Reverse The actuator loads W Better coupling to Fabrication IJ05, IJ11 spring spring. When the the ink complexity actuator is turned off, High stress in the the spring releases. spring This can reverse the force/distance curve of the actuator to make it compatible with the force/time requirements of the drop ejection. Actuator A series of thin Increased travel Increased Some piezoelectric stack actuators are stacked. Reduced drive fabrication ink jets This can be voltage complexity IJ04 appropriate where Increased possibility actuators require high of short circuits due electric field strength, to pinholes such as electrostatic and piezoelectric actuators. Multiple Multiple smaller Increases the force Actuator forces may IJ12, IJ13, IJ18, actuators actuators are used available from an not add linearly, IJ20, IJ22, IJ28, simultaneously to actuator reducing efficiency IJ42, IJ43 move the ink. Each Multiple actuators actuator need provide can be positioned to only a portion of the control ink flow force required. accurately Linear A linear spring is used Matches low travel Requires print head IJ15 Spring to transform a motion actuator with higher area for the spring with small travel and travel requirements high force into a Non-contact method longer travel, lower of motion force motion. transformation Coiled A bend actuator is Increases travel Generally restricted IJ17, IJ2l, IJ34, actuator coiled to provide Reduces chip area to planar IJ35 greater travel in a Planar implementations reduced chip area. implementations are due to extreme relatively easy to fabrication difficulty fabricate. in other orientations. Flexure A bend actuator has a Simple means of Care must be taken IJ10, IJ19, IJ33 bend small region near the increasing travel of not to exceed the actuator fixture point, which a bend actuator elastic limit in the flexes much more flexure area readily than the Stress distribution is remainder of the very uneven actuator. The actuator Difficult to flexing is effectively accurately model converted from an with finite element even coiling to an analysis angular bend, resulting in greater travel of the actuator tip Catch The actuator controls a Very low actuator Complex IJ10 small catch. The catch energy construction either enables or Very small actuator Requires external disables movement of size force an ink pusher that is Unsuitable for controlled in a bulk pigmented inks manner. Gears Gears can be used to Low force, low Moving parts are IJ13 increase travel at the travel actuators can required expense of duration. be used Several actuator Circular gears, rack Can be fabricated cycles are required and pinion, ratchets, using standard More complex drive and other gearing surface MEMS electronics methods can be used. processes Complex construction Friction, friction, and wear are possible Buckle A buckle plate can be Very fast movement Must stay within S. Hirata et al, “An plate used to change a slow achievable elastic limits of the Ink-jet Head Using actuator into a fast materials for long Diaphragm motion. It can also device life Microactuator”, convert a high force, High stresses Proc. IEEE MEMS, low travel actuator involved Feb. 1996, pp 418- into a high travel, Generally high 423. medium force motion. power requirement IJ18, IJ27 Tapered A tapered magnetic Linearizes the Complex IJ14 magnetic pole can increase magnetic construction pole travel at the expense force/distance curve of force. Lever A lever and fulcrum is Matches low travel High stress around IJ32, IJ36, IJ37 used to transform a actuator with higher the fulcrum motion with small travel requirements travel and high force Fulcrum area has no into a motion with linear movement, longer travel and and can be used for lower force. The lever a fluid seal can also reverse the direction of travel. Rotary The actuator is High mechanical Complex IJ28 impeller connected to a rotary advantage construction impeller. A small The ratio of force to Unsuitable for angular deflection of travel of the actuator pigmented inks the actuator results in can be matched to a rotation of the the nozzle impeller vanes, which requirements by push the ink against varying the number stationary vanes and of impeller vanes out of the nozzle. Acoustic A refractive or No moving parts Large area required 1993 Hadimioglu et lens diffractive (e.g. zone Only relevant for al, EUP 550, 192 plate) acoustic lens is acoustic ink jets 1993 Elrod et al, used to concentrate EUP 572,220 sound waves. Sharp A sharp point is used Simple construction Difficult to fabricate Tone-jet conductive to concentrate an using standard VLSI point electrostatic field. processes for a surface ejecting ink- jet Only relevant for electrostatic ink jets ACTUATOR MOTION Volume The volume of the Simple construction High energy is Hewlett-Packard expansion actuator changes, in the case of typically required to Thermal Ink jet pushing the ink in all thermal ink jet achieve volume Canon Bubblejet directions. expansion. This leads to thermal stress, cavitation, and kogation in thermal ink jet implementations Linear, The actuator moves in Efficient coupling to High fabrication IJ01, IJ02, IJ04, normal to a direction normal to ink drops ejected complexity may be IJ07, IJ11, IJ14 chip the print head surface. normal to the required to achieve surface The nozzle is typically surface perpendicular in the line of motion movement. Parallel to The actuator moves Suitable for planar Fabrication IJ12, IJ13, IJ15, chip parallel to the print fabrication complexity IJ33, IJ34, IJ35, surface head surface. Drop Friction IJ36 ejection may still be Stiction normal to the surface. Membrane An actuator with a The effective area of Fabrication 1982 Howkins USP push high force but small the actuator complexity 4,459,601 area is used to push a hecomes the Actuator size stiff membrane that is membrane area Difficulty of in contact with the ink. integration in a VLSI process Rotary The actuator causes Rotary levers may Device complexity IJ05, IJ08, IJ13, the rotation of some be used to increase May have friction at IJ28 element, such a grill or travel a pivot point impeller Small chip area requirements Bend The actuator bends A very small change Requires the 1970 Kyser et aJ when energized. This in dimensions can actuator to be made USP 3,946,398 may be due to be converted to a from at least two 1973 Stemme USP differential thermal large motion. distinct layers, or to 3,747,120 expansion, have a thermal IJ03, IJ09, IJ10, piezoelectric difference across the IJ19, IJ23, IJ24, expansion, actuator IJ25, IJ29, IJ30, magnetostriction, or IJ31, IJ33, IJ34, other form of relative IJ35 dimensional change. Swivel The actuator swivels Allows operation Inefficient coupling IJ06 around a central pivot. where the net linear to the ink motion This motion is suitable force on the paddle where there are is zero opposite forces Small chip area applied to opposite requirements sides of the paddle, e.g. Lorenz force. Straighten The actuator is Can be used with Requires careful IJ26, IJ32 normally bent, and shape memory balance of stresses straightens when alloys where the to ensure that the energized. austenic phase is quiescent bend is planar accurate Double The actuator bends in One actuator can be Difficult to make IJ36, IJ37, IJ38 bend one direction when used to power two the drops ejected by one element is nozzles. both bend directions energized, and bends Reduced chip size. identical the other way when Not sensitive to A small efficiency another element is ambient temperature loss compared to energized. equivalent single bend actuators. Shear Energizing the Can increase the Not readily 1985 Fishbeck USP actuator causes a shear effective travel of applicable to other 4,584, 590 motion in the actuator piezoelectric actuator material. actuators mechanisms Radial The actuator squeezes Relatively easy to High force required 1970 Zoltan USP con- an ink reservoir, fabricate single Inefficient 3,683,212 striction forcing ink from a nozzles from glass Difficult to integrate constricted nozzle. tubing as with VLSI macroscopic processes structures Coil/ A coiled actuator Easy to fabricate as Difficult to fabricate IJ17, IJ21, IJ34, uncoil uncoils or coils more a planar VLSI for non-planar IJ35 tightly. The motion of process devices the free end of the Small area required, Poor out-of-plane actuator ejects the ink. therefore low cost stiffness Bow The actuator bows (or Can increase the Maximum travel is IJ16, IJ18, IJ27 buckles) in the middle speed of travel constrained when energized. Mechanically rigid High force required Push-Pull Two actuators control The structure is Not readily suitable IJ18 a shutter. One actuator pinned at both ends, for ink jets which pulls the shutter, and so has a high out-of- directly push the ink the other pushes it. plane rigidity Curl A set of actuators curl Good fluid flow to Design complexity IJ20, IJ42 inwards inwards to reduce the the region behind volume of ink that the actuator they enclose. increases efficiency Curl A set of actuators curl Relatively simple Relatively large IJ43 outwards outwards, pressurizing construction chip area ink in a chambered surrounding the actuators, and expelling ink from a nozzle in the chamber. Iris Multiple vanes enclose High efficiency High fabrication IJ22 a volume of ink. These Small chip area complexity simultaneously rotate, Not suitable for reducing the volume pigmented inks between the vanes. Acoustic The actuator vibrates The actuator can be Large area required 1993 Hadimioglu et vibration at a high frequency. physically distant for efficient al, EUP 550, 192 from the ink operation at useful 1993 Elrod et al, frequencies EUP 572,220 Acoustic coupling and crosstalk Complex drive circuitry Poor control of drop volume and position None In various ink jet No moving parts Various other Silverbrook, EP designs the actuator tradeoffs are 0771 658 A2 and does not move. required to related patent eliminate moving application parts Tone-jet NOZZLE REFILL METHOD Surface This is the normal way Fabrication Low speed Thermal ink jet tension that ink jets are simplicity Surface tension Piezoelectric ink jet refilled. After the Operational force relatively IJ01-IJ07, IJ10-IJ14, actuator is energized, simplicity small compared to IJ16, IJ20, IJ22-IJ45 it typically returns actuator force rapidly to its normal Long refill time position. This rapid usually dominates return sucks in air the total repetition through the nozzle rate opening. The ink surface tension at the nozzle then exerts a small force restoring the meniscus to a minimum area. This force refills the nozzle. Shuttered Ink to the nozzle High speed Requires common IJ08, IJ13, IJ15, oscillating chamber is provided at Low actuator ink pressure IJ17, IJ18, IJ19, ink a pressure that energy, as the oscillator IJ21 pressure oscillates at twice the actuator need only May not be suitable drop ejection open or close the for pigmented inks frequency. When a shutter, instead of drop is to be ejected, ejecting the ink drop the shutter is opened for 3 half cycles: drop ejection, actuator return, and refill. The shutter is then closed to prevent the nozzle chamber emptying during the next negative pressure cycle. Refill After the main High speed, as the Requires two IJ09 actuator actuator has ejected a nozzle is actively independent drop a second (refill) refilled actuators per nozzle actuator is energized. The refill actuator pushes ink into the nozzle chamber. The refill actuator returns slowly, to prevent its return from emptying the chamber again. Positive The ink is held a slight High refill rate, Surface spill must Silverbrook, EP ink positive pressure. therefore a high be prevented 0771 658 A2 and pressure After the ink drop is drop repetition rate Highly hydrophobic related patent ejected, the nozzle is possible print head surfaces applications chamber fills quickly are required Alternative for:, as surface tension and IJ01-IJ07, IJ10-IJ14, ink pressure both IJ16, IJ20, IJ22-IJ45 operate to refill the nozzle. METHOD OF RESTRICTING BACK-FLOW THROUGH INLET Long inlet The ink knlet channel Design simplicity Restricts refill rate Thermal ink jet channel to the nozzle chamber Operational May result in a Piezoelectric ink jet is made long and simplicity relatively large chip IJ42, IJ43 relatively narrow, Reduces crosstalk area relying on viscous Only partially drag to reduce inlet effective back-flow. Positive The ink is under a Drop selection and Requires a method Silverbrook, EP ink positive pressure, so separation forces (such as a nozzle 0771 658 A2 and pressure that in the quiescent can be reduced rim or effective related patent state some of the ink Fast refill time hydrophobizing, or applications drop already protrudes both) to prevent Possible operation from the nozzle. flooding of the of the following: This reduces the ejection surface of IJ01-IJ07, IJ09- pressure in the nozzle the print head. IJ12, IJ14, IJ16, chamber which is IJ20, IJ22, IJ23- required to eject a IJ34, IJ36-IJ41, certain volume of ink. IJ44 The reduction in chamber pressure results in a reduction in ink pushed out through the inlet. Baffle One or more baffles The refill rate is not Design complexity HP Thermal Ink Jet are placed in the inlet as restricted as the May increase Tektronix ink flow. Then the long inlet method. fabrication piezoelectric ink jet actuator is energized, Reduces crosstalk complexity (e.g. the rapid ink Tektronix hot melt movement creates Piezoelectric print eddies which restrict heads). the flow through the inlet. The slower refill process is unrestricted, and does not result in eddies. Flexible In this method recently Significantly Not applicable to Canon flap disclosed by Canon, reduces back-flow most ink jet restricts the expanding actuator for edge-shooter configurations inlet (bubble) pushes on a thermal ink jet Increased flexible flap that devices fabrication restricts the inlet. complexity Inelastic deformation of polymer flap results in creep over extended use Inlet filter A filter is located Additional Restricts refill rate IJ04, IJ12, IJ24, between the ink inlet advantage of ink May result in IJ27, IJ29, IJ30 and the nozzle filtration complex chamber. The filter Ink filter may be construction has a multitude of fabricated with no small holes or slots, additional process restricting ink flow. steps The filter also removes particles which may block the nozzle. Small inlet The ink inlet channel Design simplicity Restricts refill rate IJ02, IJ37, IJ44 compared to the nozzle chamber May result in a to nozzle has a substantially relatively large chip smaller cross section area than that of the nozzle, Only partially resulting in easier ink effective egress out of the nozzle than out of the inlet. Inlet A secondary actuator Increases speed of Requires separate IJ09 shutter controls the position of the ink-jet print refill actuator and a shutter, closing off head operation drive circuit the ink inlet when the main actuator is energized. The inlet is The method avoids the Back-flow problem Requires careful IJ01, IJ03, IJ05, located problem of inlet back- is eliminated design to minimize IJ06, IJ07, IJ10, behind the flow by arranging the the negative IJ11, IJ14, IJ16, ink- ink-pushing surface of pressure behind the IJ22, IJ23, IJ25, pushing the actuator between paddle IJ28, IJ31, IJ32, surface the inlet and the IJ33, IJ34, IJ35, nozzle. IJ36, IJ39, IJ40, IJ41 Part of the The actuator and a Significant Small increase in IJ07, IJ20, IJ26, actuator wall of the ink reductions in back- fabrication IJ38 moves to chamber are arranged flow can be complexity shut off so that the motion of achieved the inlet the actuator closes off Compact designs the inlet. possible Nozzle In some configurations Ink back-flow None related to ink Silverbrook, EP actuator of ink jet, there is no problem is back-flow on 0771 658 A2 and does not expansion or eliminated actuation related patent result in movement of an applications ink back- actuator which may Valve-jet flow cause ink back-flow Tone-jet through the inlet. NOZZLE CLEARING METHOD Normal All of the nozzles are No added May no be Most ink jet systems nozzle fired periodically, complexity on the sufficient to IJ01, IJ02, IJ03, firing before the ink has a print head displace dried ink IJ04, IJ05, IJ06, chance to dry. When IJ07, IJ09, IJ10, not in use the nozzles IJ11, IJ12, IJ14, are sealed (capped) IJ16, IJ20, IJ22, against air. IJ23, IJ24, IJ25, The nozzle firing is IJ26, IJ27, IJ28, usually performed IJ29, IJ30, IJ31, during a special IJ32, IJ33, IJ34, clearing cycle, after IJ36, IJ37, IJ38, first moving the print IJ39, IJ40, IJ41, head to a cleaning IJ42, IJ43, IJ44, station. IJ45 Extra In systems which heat Can be highly Requires higher Silverbrook, EP power to the ink, but do not boil effective if the drive voltage for 0771 658 A2 and ink heater it under normal heater is adjacent to clearing related patent situations, nozzle the nozzle May require larger applications clearing can be drive transistors achieved by over- powering the heater and boiling ink at the nozzle. Rapid The actuator is fired in Does not require Effectiveness May be used with: succes- rapid succession. In extra drive circuits depends IJ01, IJ02, IJ03, sion of some configurations, on the print head substantially upon IJ04, IJ05, IJ06, actuator this may cause heat Can be readily the configuration of IJ07, IJ09, IJ10, pulses build-up at the nozzle controlled and the ink jet nozzle IJ11, IJ14, IJ16, which boils the ink, initiated by digital IJ20, IJ22, IJ23, clearing the nozzle. In logic IJ24, IJ25, IJ27, other situations, it may IJ28, IJ29, IJ30, cause sufficient IJ31, IJ32, IJ33, vibrations to dislodge IJ34, IJ36, IJ37, clogged nozzles. IJ38, IJ39, IJ40, IJ41, IJ42, IJ43, IJ44, IJ45 Extra Where an actuator is A simple solution Not suitable where May be used with: power to not normally driven to where applicable there is a hard limit IJ03, IJ09, IJ16, ink the limit of its motion, to actuator IJ20, IJ23, IJ24, pushing nozzle clearing may be movement IJ25, IJ27, IJ29, actuator assisted by providing IJ30, IJ31, IJ32, an enhanced drive IJ39, IJ40, IJ41, signal to the actuator. IJ42, IJ43, IJ44, IJ45 Acoustic An ultrasonic wave is A high nozzle High IJ08, IJ13, IJ15, resonance applied to the ink clearing capability implementation cost IJ17, IJ18, IJ19, chamber. This wave is can be achieved if system does not IJ21 of an appropriate May be already include an amplitude and implemented at very acoustic actuator frequency to cause low cost in systems sufficient force at the which already nozzle to clear include acoustic blockages. This is actuators easiest to achieve if the ultrasonic wave is at a resonant frequency of the ink cavity. Nozzle A microfabricated Can clear severely Accurate Silverbrook, EP clearing plate is pushed against clogged nozzles mechanical 0771 658 A2 and plate the nozzles. The plate alignment is related patent has a post for every required applications nozzle. A post moves Moving parts are through each nozzle. required displacing dried ink. There is risk of damages to the nozzles Accurate fabrication is required Ink The pressure of the ink May be effective Requires pressure May be used with pressure is temporarily where other pump or other all IJ series ink jets pulse increased so that ink methods cannot be pressure actuator streams from all of the used Expensive nozzles. This may be Wasteful of ink used in conjunction with actuator energizing. Print head A flexible ‘blade’ is Effective for planar Difficult to use if Many ink jet wiper wiped across the print print head surfaces print head surface is systems head surface. The Low cost non-planar or very blade is usually fragile fabricated from a Requires flexible polymer, e.g. mechanical parts rubber or synthetic Blade can wear out elastomer. in high volume print systems Separate A separate heater is Can be effective Fabrication Can be used with ink boiling provided at the nozzle where other nozzle complexity many IJ series ink heater although the normal clearing methods drop e-ection cannot be used mechanism does not Can be implemented require it. The heaters at no additional cost do not require in some ink jet individual drive configurations circuits, as many nozzles can be cleared simultaneously, and no imaging is required. NOZZLE PLATE CONSTRUCTION Electro- A nozzle palte is Fabrication High temperatures Hewlett Packard formed separately fabricated simplicity and pressures are Thermal Ink jet nickel from electroformed required to bond nickel, and bonded to nozzle plate the print head chip. Minimum thickness constraints Differential thermal expansion Laser Individual nozzle No masks required Each hole must be Canon Bubblejet ablated or holes are ablated by an Can be quite fast individually formed 1988 Sercel et al., drilled intense UV laser in a Some control over Special equipment SPIE, Vol, 998 polymer nozzle plate, which is nozzle profile is required Excimer Beam typically a polymer possible Slow where there Applications, pp. such as polyimide or Equipment required are many thousands 76-83 polysulphone is relatively low cost of nozzles per print 1993 Watanabe et head at., USP 5,208,604 May produce thin burrs at exit holes Silicon A separate nozzle High accuracy is Two part K. Bean, IEEE micro- plate is attainable construction Transactions on machined micromachined from High cost Electron Devices, single crystal silicon, Requires precision Vol. ED-25, No. 10, and bonded to the alignment 1978, pp 1185-1195 print head wafer. Nozzles may be Xerox 1990 clogged by adhesive Hawkins et al., USP 4,899,181 Glass Fine glass capillaries No expensive Very small nozzle 1970 Zoltan USP capillaries are drawn from glass equipment required sizes are difficult to 3,683,212 tubing. This method Simple to make form has been used for single nozzles Not suited for mass making individual production nozzles, but is difficult to use for bulk manufacturing of print heads with thousands of nozzles. Monolithic, The nozzle plate is High accuracy (<1 Requires sacrificial Silverbrook, EP surface deposited as a layer μm) layer under the 0771 658 A2 and micro- using standard VLSI Monolithic nozzle plate to form related patent machined deposition techniques. Low cost the nozzle chamber applications using VLSI Nozzles are etched in Existing processes Surface may be IJ01, IJ02, IJ04, litho- the nozzle plate using can be used fragile to the touch IJ11, IJ12, IJ17, graphic VLSI lithography and IJ18, IJ20, IJ22, processes etching. IJ24, IJ27, IJ28, IJ29, IJ30, IJ31, IJ32, IJ33, IJ34, IJ36, IJ37, IJ38, IJ39, IJ40, IJ41, IJ42, IJ43, IJ44, Monolithic, The nozzle plate is a High accuracy (<1 Requires long etch IJ03, IJ05, IJ06, etched buried etch stop in the μm) times IJ07, IJ08, IJ09, through wafer. Nozzle Monolithic Requires a support IJ10, IJ13, IJ14, substrate chambers are etched in Low cost wafer IJ15, IJ16, IJ19, the front of the wafer, No differential IJ21, IJ23, IJ25, and the wafer is expansion IJ26 thinned from the back side. Nozzles are then etched in the etch stop layer. No nozzle Various methods have No nozzles to Difficult to control Ricoh 1995 Sekiya plate been tried to eliminate become clogged drop position et al USP 5,412,413 the nozzles entirely, to accurately 1993 Hadimioglu et prevent nozzle Crosstalk problems al EUP 550,192 clogging. These 1993 Elrod et al include thermal bubble EUP 572,220 mechanisms and acoustic lens mechanisms Trough Each drop ejector has Reduced Drop firing IJ35 a trough through manufacturing direction is sensitive which a paddle moves. complexity to wicking. There is no nozzle Monolithic plate. Nozzle slit The elimination of No nozzles to Difficult to control 1989 Saito et al instead of nozzle holes and become clogged drop position USP 4,799,068 individual replacement by a slit accurately nozzles encompassing many Crosstalk problems actuator positions reduces nozzle clogging, but increases crosstalk due to ink surface waves DROP EJECTION DIRECTION Edge Ink flow is along the Simple construction Nozzles limited to Canon Bubblejet (‘edge surface of the chip, No silicon etching edge 1979 Endo et al GB shooter’) and ink drops are required High resolution is patent 2,007,162 ejected from the chip Good heat sinking difficult Xerox heater-in-pit edge. via substrate Fast color printing 1990 Hawkins et al Mechanically strong requires one print USP 4,899,181 Ease of chip head per color Tone-jet handing Surface Ink flow is along the No bulk silicon Maximum ink flow Hewlett-Packard TIJ (‘roof surface of the chip, etching required is severely restricted 1982 Vaught et al shooter’ and ink drops are Silicon can make an USP 4,490,728 ejected from the chip effective heat sink IJ02, IJ11, IJ12, surface, normal to the Mechanical strength IJ20, IJ22 plane of the chip. Through Ink flow is through the High ink flow Requires bulk Silverbrook, EP chip, chip, and ink drops are Suitable for silicon etching 0771 658 A2 and forward ejected from the front pagewidth print related patent (‘up surface of the chip. heads applications shooter’) High nozzle packing IJ04, IJ17, IJ18, density therefore IJ24, IJ27-IJ45 low manufacturing cost Through Ink flow is through the High ink flow Requires wafer IJ01, IJ03, IJ05, chip, chip, and ink drops are Suitable for thinning IJ06, IJ07, IJ08, reverse ejected from the rear pagewidth print Requires special IJ09, IJ10, IJ13, (‘down surface of the chip. heads handling during IJ14, IJ15, IJ16, shooter’) High nozzle packing manufacture IJ19, IJ21, IJ23, density therefore IJ25, IJ26 low manufacturing cost Through Ink flow is through the Suitable for Pagewidth print Epson Stylus actuator actuator, which is not piezoelectric print heads require Tektronix hot melt fabricated as part of heads several thousand piezoelectric ink jets the same substrate as connections to drive the drive transistors. circuits Cannot be manufactured in standard CMOS fabs Complex assembly required INK TYPE Aqueous, Water based ink which Environmentally Slow drying Most existing ink dye typically contains: friendly Corrosive jets water, dye, surfactant, No odor Bleeds on paper All IJ series ink jets humectant, and May strikethrough Silverbrook, EP biocide. Cockles paper 0771 658 A2 and Modern ink dyes have related patent high water-fastness, applications ligh fastness Aqueous, Water based ink which Environmentally Slow drying IJ02, IJ04, IJ21, pigment typically contains: friendly Corrosive IJ26, IJ27, IJ30 water, pigment, No odor Pigment may clog Silverbrook, EP surfactant, humectant, Reduced bleed nozzles 0771 658 A2 and and biocide. Reduced wicking Pigment may clog related patent Pigments have an Reduced actuator applications advantage in reduced strikethrough mechanisms Piezoelectric ink- bleed, wicking and Cockles paper jets strikethrough. Thermal ink jets (with significant restrictions) Methyl MEK is a highly Very fast drying Odorous All IJ series ink jets Ethyl volatile solvent used Prints on various Flammable Ketone for industrial printing substrates such as (MEK) on difficult surfaces metals and plastics such as aluminum cans. Alcohol Alcohol based inks Fast drying Sligh odor All IJ series ink jets (ethanol, can be used where the Operates at sub- Flammable 2-butanol, printer must operate at freezing and temperatures below temperatures others) the freezing point of Reduced paper water. An example of cockle this is in-camera Low cost consumer photographic printing. Phase The ink is solid at No drying time- ink High viscosity Tektronix hot melt change room temperature, and instantly freezes on Printed ink typically piezoelectric ink jets (hot melt) is melted in the print the print medium has a ‘waxy’ feel 1989 Nowak USP head before jetting. Almost any print Printed pages may 4,820,346 Hot melt inks are medium can be used ‘block’ All IJ series ink jets usually wax based, No paper cockle Ink temperature with a melting point occurs may be above the around 80° C. After No wicking occurs curie point of jetting the ink freezes No bleed occurs permanent magnets almost instantly upon No strikethrough Ink heaters consume contacting the print occurs power medium or a transfer Long warm-up time roller. Oil Oil based inks are High solubility High viscosity: this All IJ series ink jets extensively used in medium for some is a significant offset printing. They dyes limitation for use in have advantages in Does not cockle ink jets, which improved paper usually require a characteristics on Does no wick low viscosity. Some paper (especially no through paper short chain and wicking or cockle). multi-branched oils Oil soluble dies and have a sufficiently pigments are required. low viscosity. Slow drying Micro- A microemulsion is a Stops ink bleed Viscosity higher All IJ series ink jets emulsion stable, self forming High dye solubility than water emulsion of oil, water, Water, oil, and Cost is slightly and surfactant. The amphiphilic soluble higher than water characteristic drop size dies can be used based ink is less than 100 nm, Can stabilize High surfactant and is determined by pigment concentration the preferred curvature suspensions required (around of the surfactant. 5%) 

What is claimed is:
 1. A method of manufacture of an inkjet printhead which includes: providing a substrate; depositing a doped layer on the substrate and etching said layer to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle; and utilizing planar monolithic deposition, lithographic and etching processes to create a paddle arranged in each nozzle chamber, each paddle being connected to a thermal bend actuator unit and the thermal bend actuator unit comprising a tapered thermal bend device.
 2. A method of manufacturing an inkjet printhead as claimed in claim 1 wherein multiple inkjet printheads are formed simultaneously on the substrate.
 3. A method of manufacturing an ink jet printhead as claimed in claim 1 wherein said substrate is a silicon wafer.
 4. A method of manufacturing an inkjet printhead as claimed in claim 1 wherein integrated drive electronics are formed on the same substrate.
 5. A method of manufacturing an ink jet printhead as claimed in claim 4 wherein said integrated drive electronics are formed using a CMOS fabrication process.
 6. A method of manufacturing an inkjet printhead as claimed in claim 1 wherein ink is ejected from said substrate normal to said substrate.
 7. A method of manufacture of an ink jet printing nozzle arrangement on a wafer, said arrangement including: an ink chamber having an ink ejection nozzle in one wall thereof for the ejection of ink from said ink chamber; a moveable paddle vane located within said ink chamber, said paddle vane including a concave surface in the area adjacent said ink ejection nozzle; and an actuator means adapted to move said paddle vane so as to cause ink within said ink chamber to be ejected from said ink ejection nozzle; said method comprising the steps of: (a) starting with a silicon wafer layer having requisite circuitry deposited thereon; (b) depositing and etching a first sacrificial layer to form a cavity for said paddle vane and a portion of said nozzle chamber; (c) depositing and etching a series of layers simultaneously forming the operational portions of said actuator means and said paddle vane; (d) depositing a second sacrificial layer forming a cavity for said ink chamber walls and remaining portions (if any) of said actuator; (e) depositing said chamber walls and remaining portions of said actuator; (f) forming a nozzle chamber roof including an ink ejection nozzle; and (g) etching said sacrificial layers away.
 8. A method as claimed in claim 7 wherein the step (c) includes utilizing a single mask to etch said layers.
 9. A method as claimed in claim 7 wherein said step (c) includes depositing two layers of substantially the same thermal properties, one of said layers including the an operational portion of said actuator, such that, upon cooling of said layers, said two layers are in a state of thermal tension between one other.
 10. A method as claimed in claim 7 wherein said wafer comprises a double side polished CMOS wafer.
 11. A method as claimed in claim 7 wherein step (g) is also utilized to simultaneously separate said wafer into separate printheads. 